Download PDF by Harland G. Tompkins,William A. McGahan: Spectroscopic Ellipsometry and Reflectometry: A User's Guide

By Harland G. Tompkins,William A. McGahan

whereas unmarried wave ellipsometry has been round for years, spectroscopic ellipsometry is quick turning into the strategy of selection for measuring the thickness and optical houses of skinny movies. This publication offers the 1st useful advent to spectroscopic ellipsometry and the similar ideas of reflectometry. A advisor for practitioners and researchers in quite a few disciplines, it addresses a vast variety of purposes in physics, chemistry, electric engineering, and fabrics science.

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Spectroscopic Ellipsometry and Reflectometry: A User's Guide by Harland G. Tompkins,William A. McGahan


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